Wafer Surface Analyzer   SEO-PIONEER300

    The Pioneer 300 Wafer Surface Analysis System is specially designed for use in 300 mm semiconductor wafer processing for quality control. The Pioneer 300 provides quick and accurate contact angle/surface energy measurements of the wafer surface to adhension, cleanliness and surface treatments.
    The use of anti-static materials in the Pioneer 300 makes it well suited for semiconductor applications. The inner porions are specially designed to prevent particulate formation or contamination and the system can be used to monitor the ultra clean surfce processing of silicon wafers.
    The position of the sample stage is computer controlled and can be precisely adjusted along the x-,y-, or z- axis. The user can easily control the position of the stage to allow for wafer surface mapping.
    The instrument uses  micro-pump controlled by PC for precise and repeatable liquid drop formation and application. This insures that a reproducible drop volume is applied to the surface.

    applications

     1. Coating assessment of the HMDS process.
     2. Wafer mapping Display for surface contamintion detection.
     3. Adhesive and primer preparation.
     4. Coating uniformity & Coating quality.

         Specifications

Name

Pioneer 300 M (Manual type)

Pioneer 300 A (Automatic type)

(Wafer cleanness and treament analyzer)

Unit size(L*H*W)

1000*700*750 (mm)

Power

220V, 50/60Hz

Max. Sample size(L*W)

300 mm wafer (4/6/8/12 inch wafer available)

Max. Sample thickness

10 (mm)

Total weight

70 (kg)

Zoom

6.4 fold

Focus

internal, ±6 mm

Resolution

768 × 576 NTSC, 16M color

Max. Measuring speed

30 images/s

Moving type

Automatic (x-y-z- and rotating)

Dispenser type

Controllable Micro pump (1 ¥ì step)

Light source

Rear lamp, Halogen (control by dimmer)

Operating system

Windows 95/ 98/ Me

Contact angle

0~180° ±0.1°accuracy

Evaluation methods

Static contact angles / Surface energy

Accessories

Instruction/Operation Manual, tip set, level, tweezers

fuse, lamp, Teflon tube, Tool box etc.

Options

External temperature measurement

SPC software

 Send your inquiryInquiry form

 E-mail: lab@labkorea.com

ESEL TECHTRA INC..

 #1382-4, Kuweol-3dong, Namdongku, Incheon, korea

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