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The Pioneer 300 Wafer Surface Analysis System is
specially designed for use in 300 mm semiconductor wafer processing for quality
control. The Pioneer 300 provides quick and accurate contact
angle/surface energy measurements of the wafer surface to adhension, cleanliness
and surface treatments. The use of anti-static materials in the Pioneer 300
makes it well suited for semiconductor applications. The inner porions are
specially designed to prevent particulate formation or contamination and the
system can be used to monitor the ultra clean surfce processing of silicon
wafers. The position of the sample stage is computer controlled and can be
precisely adjusted along the x-,y-, or z- axis. The user can easily control the
position of the stage to allow for wafer surface mapping. The instrument uses
micro-pump controlled by PC for precise and repeatable liquid drop formation
and application. This insures that a reproducible drop volume is applied to the
surface.
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applications
1. Coating assessment of the HMDS process. 2. Wafer mapping Display for
surface contamintion detection. 3. Adhesive and primer preparation. 4.
Coating uniformity & Coating quality.
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Specifications
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Name |
Pioneer 300
M (Manual type) |
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Pioneer 300
A (Automatic type) |
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(Wafer
cleanness and treament analyzer) |
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Unit
size(L*H*W) |
1000*700*750
(mm) |
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Power |
220V,
50/60Hz |
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Max. Sample
size(L*W) |
300 mm wafer
(4/6/8/12 inch wafer available) |
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Max. Sample
thickness |
10
(mm) |
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Total
weight |
70
(kg) |
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Zoom |
6.4
fold |
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Focus |
internal, ±6
mm |
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Resolution |
768 × 576
NTSC, 16M color |
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Max.
Measuring speed |
30
images/s |
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Moving
type |
Automatic
(x-y-z- and rotating) |
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Dispenser
type |
Controllable
Micro pump (1 ¥ì step) |
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Light
source |
Rear lamp,
Halogen (control by dimmer) |
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Operating
system |
Windows 95/
98/ Me |
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Contact
angle |
0~180°
±0.1°accuracy |
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Evaluation
methods |
Static
contact angles / Surface energy |
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Accessories |
Instruction/Operation Manual, tip set, level, tweezers |
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fuse, lamp,
Teflon tube, Tool box etc. |
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Options
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External
temperature measurement |
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SPC
software |
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